Cryopump system

ABSTRACT

A cryopump system includes: a plurality of cryopumps connected to a common roughing pump in a rough line and provided with a plurality of rough valves in the rough line, respectively; and a controller configured to control each of the rough valves for regenerating a corresponding one of the plurality of cryopumps. A delay time is set between closing of an open one of the plurality of rough valves and opening of a closed one of the plurality of rough valves. The controller applies the delay time uniformly upon closing of each of the rough valves.

CROSS REFERENCE TO RELATED APPLICATION

The present application is a continuation of application Ser. No.13/471,136 filed May 14, 2012, the contents of which, includingspecification, claims and drawings, are incorporated herein by referencein their entirety.

BACKGROUND OF THE INVENTION

Field of the Invention

The present invention relates to a cryopump system and a method forregenerating cryopumps.

Description of the Related Art

A cryopump is a vacuum pump that traps gas molecules by condensing oradsorbing them on cryopanels cooled to a cryogenic temperature so as topump them. A cryopump is generally used to attain a clean vacuumenvironment required for semiconductor circuit manufacturing process, orthe like. A cryopump is a so-called entrapment vacuum pump, in whichregeneration is required on a regular basis for discharging the trappedgas to the outside. A roughing pump may be used for the discharging.

SUMMARY OF THE INVENTION

According to an aspect of the present invention, there is provided acryopump system including: a plurality of cryopumps connected to acommon roughing pump and provided with a plurality of rough valves,respectively; and a controller configured to control each of the roughvalves for regenerating a corresponding one of the plurality ofcryopumps. A delay time is set between closing of an open one of theplurality of rough valves and opening of a closed one of the pluralityof rough valves.

According to another aspect of the present invention, there is provideda method for regenerating a plurality of cryopumps, the plurality ofcryopumps being connected to a common rough line. The method includes:first rough-pumping a cryopump through the rough line; and secondrough-pumping another cryopump through the rough line after a delay timepasses from the first rough pumping.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments will now be described, by way of example only, withreference to the accompanying drawings, which are meant to be exemplary,not limiting, and wherein like elements are numbered alike in severalfigures, in which:

FIG. 1 shows a diagram schematically illustrating a configuration of acryopump system according to an exemplary embodiment of the presentinvention;

FIG. 2 shows a diagram schematically illustrating a cryopump accordingto an exemplary embodiment of the present invention;

FIG. 3 shows a flowchart for describing a regenerating method accordingto an exemplary embodiment of the present invention; and

FIG. 4 shows a flowchart for describing a control process according toan exemplary embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The invention will now be described by reference to the preferredembodiments. This does not intend to limit the scope of the presentinvention, but to exemplify the invention.

In a vacuum system having a plurality of cryopumps, a roughing vacuumpump may be shared by some cryopumps. To reduce a regeneration time ofthe plurality of cryopumps as a whole, they are preferably regeneratedin parallel. When the roughing pump is switched from a cryopump toanother cryopump, these cryopumps generally have different pressures.

One of exemplary purposes of an aspect of the present invention is toalleviate an influence on a regeneration process caused by thedifference in pressure between the plurality of cryopumps.

FIG. 1 shows a diagram schematically illustrating a configuration of acryopump system 100 according to an exemplary embodiment of the presentinvention. The cryopump system 100 is used for vacuum evacuation of avacuum chamber (not shown) in a vacuum processing apparatus thatprocesses an object in a vacuum environment. The vacuum processingapparatus is an apparatus used in a semiconductor manufacturing process,such as an ion implantation apparatus or a sputtering apparatus.

The cryopump system 100 includes a plurality of cryopumps 10. Thecryopumps 10 are mounted on a vacuum chamber and are used to increasethe vacuum level inside the vacuum chamber (not shown) to a levelrequired by a desired process. For example, a high vacuum level of about10⁻⁵ Pa to 10⁻⁸ Pa is attained in the vacuum chamber. Each of thecryopumps 10 has a cryopump housing 30 that contains the components of acryopump 10, and a rough valve 72 that is provided with the pump housing30. A configuration of the cryopump 10 according to an exemplaryembodiment will be described in detail below with reference to FIG. 2.

The cryopump system 100 has a cryopump controller (hereinafter alsoreferred to as “CP controller”) 20. The CP controller 20 controls thecryopumps 10. That is, the cryopumps 10 are operated according to acontrol command determined by the CP controller 20. The CP controller 20also controls opening/closing of the rough valves 72.

The CP controller 20 has, for example, a CPU that executes variouscomputation processes, a ROM that stores various control programs, a RAMthat is used as a work area to store data or execute programs, aninput/output interface and a memory. Further, the CP controller 20 isconfigured to communicate with a host controller (not shown) thatcontrols a vacuum processing apparatus. The CP controller 20 is formedseparately from or integrally with the cryopumps 10. In FIG. 1, controlcommunication lines between the cryopumps 10 and the CP controller 20are indicated by broken lines.

A rough line 90 is provided with the cryopumps 10 for use in roughpumping of them. The cryopump system 100 may include the rough line 90,or a vacuum processing apparatus that is evacuated by the cryopumpsystem 100 may include the rough line 90. The rough line 90 may be partof a vacuum evacuation system configured to provide vacuum evacuationfor the cryopump system 100 and/or the vacuum processing apparatus. Thevacuum evacuation system may include the cryopump system 100.

The rough line 90 is provided for use in rough pumping of the pluralityof cryopumps 10. The cryopumps 10 are connected to the common rough line90. The rough line 90 has a roughing vacuum pump 73 and rough piping 92.The roughing pump 73 is commonly provided for the plurality of cryopumps10, and the plurality of cryopumps 10 share the roughing pump 73. Two ormore roughing vacuum pumps 73 may be provided and these roughing pumpsmay be shared by a plurality of cryopumps 10. The roughing pump 73 maybe connected to a vacuum chamber of the vacuum processing apparatus, andused for evacuation of this vacuum chamber.

The roughing pump 73 is a vacuum pump that vacuums the plurality ofcryopumps 10, and is preferably a rough pump or a dry pump. Thecryopumps 10 are main pumps for a vacuum chamber, and the roughing pump73 is an auxiliary pump. The roughing pump 73 is a vacuum pump thatprovides in each cryopump 10 a base pressure level that is an initialpressure for the cryopump 10 in operation, in other words, a low vacuumregion of an operating pressure range of the cryopump 10. The roughingpump 73 can reduce the pressure in the cryopump housings 30 fromatmospheric pressure to the base pressure level. The base pressure levelcorresponds to a high vacuum region of the roughing pump 73, and isincluded in an overlapping portion of operating pressure ranges of theroughing pump 73 and the cryopumps 10. The base pressure level is in,for example, a range equal to or more than 1 Pa and equal to and lessthan 10 Pa.

The rough piping 92 connects rough valves 72 for the plurality ofcryopumps 10 to the roughing pump 73. The rough valves 72 may beregarded as part of the rough line 90. The rough piping 92 has aroughing-pump pipe 94, a branching portion 96 and cryopump pipes 98.

The roughing-pump pipe 94 connects the roughing pump 73 to the branchingportion 96. The cryopump pipes 98 are each provided for the plurality ofcryopumps 10, and connect the respective cryopumps 10 and the branchingportion 96. The cryopump pipes 98 connect the respective rough valves 72to the branching portion 96. At the branching portion 96, the cryopumppipes 98 join the roughing-pump pipe 94. The branching portion 96 maybe, for example, manifold. Part of the rough piping 92 may be includedin the vacuum processing apparatus.

Thus, the plurality of cryopumps 10 are connected to the roughing pump73 in parallel. An exhausted gas flow through the cryopump pipes 98 arecollected through the branching portion 96 to the roughing-pump pipe 94.

The rough valve 72 is a vacuum valve for connecting or isolating itscorresponding cryopump 10 to or from the roughing pump 73. Each of therough valves 72 is connected to the roughing pump 73 through the roughpiping 92. The rough valve 72 is opened for communication between thecorresponding cryopump housing 30 and the roughing pump 73. The roughvalve 72 is closed for isolating the corresponding cryopump housing 30from the roughing pump 73. By opening the rough valve 72 and operatingthe roughing pump 73, the inside of the corresponding cryopump 10 can bedepressurized to the base pressure level.

In addition, the rough valves 72 may not be respectively mounted on theplurality of cryopumps 10. For example, a switching mechanism configuredto switch connection of the roughing pump 73 to at least one selectedcryopump 10 may be provided in the middle of the rough line 90. Thisswitching mechanism may be regarded as the rough valve 72.

The rough valve 72 is opened when receiving an opening command from avalve control unit such as the CP controller 20, and is closed whenreceiving a closing command. During the vacuum pumping operation of acryopump 10, the corresponding rough valve 72 is closed. During theregeneration of a cryopump 10, the corresponding rough valve 72 isallowed to open. The rough valve 72 is selectively and exclusivelyopened. The rough valves 72 connected to the roughing pump 73 are notopen at the same time. That is, when one of the plurality of roughvalves 72 is open, the other rough valves 72 are closed. Thus, thecommon roughing pump 73 individually pumps a gas in each cryopump 10.

The CP controller 20 allows the plurality of cryopumps 10 to beregenerated at the same time or in parallel. In this case, a request ofrough pumping for a certain cryopump 10 may be generated while adifferent cryopump 10 is being rough pumped. Hence, the CP controller 20adjusts the order of rough pumping of the plurality of cryopumps 10.

For example, the CP controller 20 sequentially executes a plurality ofrequests of rough pumping one by one in the order that the requests havebeen generated. The CP controller 20 prohibits the remaining cryopumps10 from rough pumping before the running rough pumping for a specificcryopump 10 has been completed. When a new request of rough pumping forone of the remaining cryopumps 10 is generated during the running roughpumping, the CP controller 20 suspends the new request before the roughpumping processes in accordance with all the requests that have beenever generated are completely executed.

The CP controller 20 may re-order the roughing processes between theplurality of cryopumps 10 if required. Hence, the CP controller 20 mayset priority on a certain cryopump 10 or the corresponding request ofrough, and determine the roughing order based on the priority.

FIG. 2 shows a diagram schematically illustrating the cryopump 10according to an exemplary embodiment of the present invention. Thecryopump 10 has the cryopump housing 30, a radiation shield 40 and arefrigerator 50.

The refrigerator 50 is, for example, a Gifford-McMahon refrigerator(so-called GM refrigerator) or the like. The refrigerator 50 is providedwith a first cylinder 11, a second cylinder 12, a first cooling stage13, a second cooling stage 14, and a valve drive motor 16. The firstcylinder 11 and the second cylinder 12 are connected in series. Thefirst cooling stage 13 is installed at a coupling portion side where thefirst cylinder 11 is connected to the second cylinder 12, and the secondcooling stage 14 is installed on the second cylinder 12 at the end thatis farthest from the first cylinder 11. The refrigerator 50 shown inFIG. 2 is a two-stage refrigerator and achieves lower temperature bycombining two cylinders in series. The refrigerator 50 is connected to acompressor 52 through a refrigerant pipe 18.

The compressor 52 compresses a refrigerant gas, i.e., an operating gas,such as helium or the like, and supplies the gas to the refrigerator 50through the refrigerant pipe 18. While cooling the operating gas byallowing the gas to pass through a regenerator, the refrigerator 50further cools the gas by expanding the gas first in an expansion chamberinside the first cylinder 11 and in an expansion chamber in the secondcylinder 12. The regenerator is installed inside the expansion chambers.Thereby, the first cooling stage 13 installed on the first cylinder 11is cooled to a first cooling temperature level while the second coolingstage 14 installed on the second cylinder 12 is cooled to a secondcooling temperature level lower than the first cooling temperaturelevel. For example, the first cooling stage 13 is cooled to about 65 Kto 100 K, while the second cooling stage 14 is cooled to about 10 K to20 K.

The operating gas, which has absorbed heat by expanding in therespective expansion chambers and cooled respective cooling stages,passes through the regenerator again and is returned to the compressor52 through the refrigerant pipe 18. The flows of the operating gas fromthe compressor 52 to the refrigerator 50 and from the refrigerator 50 tothe compressor 52 are switched by a rotary valve (not shown) in therefrigerator 50. The valve drive motor 16 rotates the rotary valve withpower supplied from an external power source.

The CP controller 20 controls the refrigerator 50 based on the coolingtemperature of the first cooling stage 13 or the second cooling stage14. For this purpose, a temperature sensor (not shown) may be providedon the first cooling stage 13 or on the second cooling stage 14. The CPcontroller 20 may control the cooling temperature by controlling thedriving frequency of the valve drive motor 16. For this purpose, the CPcontroller 20 may comprise an inverter for controlling the valve drivemotor 16. The CP controller 20 may be configured so as to control thecompressor 52 and respective valves, which will be described later.

The cryopump 10 illustrated in FIG. 2 is a so-called horizontal-typecryopump. In the horizontal-type cryopump, the second cooling stage 14of the refrigerator is generally inserted into the radiation shield 40along the direction that intersects with the axis of the cylindricalradiation shield 40 (usually in an orthogonal direction). In addition,the present invention is also applicable to a so-called vertical-typecryopump in a similar way. In the vertical-type cryopump, therefrigerator is inserted along the axis of the radiation shield.

The cryopump housing 30 has a portion 32 formed into a cylindrical shape(hereinafter, referred to as a “trunk portion”) 32, one end of whichbeing provided with an opening and the other end being closed. Theopening is provided as a pump inlet 34 for receiving a gas to beevacuated from the vacuum chamber of a sputtering apparatus or the like,to which the cryopump is to be connected. The pump inlet 34 is definedby the interior surface of the upper end of the trunk portion 32 of thecryopump housing 30. Further, on the trunk portion 32, an opening 37 forinserting the refrigerator 50 is formed in addition to the pump inlet34. One end of a cylindrically shaped refrigerator container 38 isfitted to the opening 37 on the trunk portion 32 while the other endthereof is fitted to the housing of the refrigerator 50. Therefrigerator container 38 contains the first cylinder 11 of therefrigerator 50.

Further, at the upper end of the trunk portion 32 of the cryopumphousing 30, a mounting flange 36 extends outwardly in the radialdirection. The cryopump 10 is mounted, by using the mounting flange 36,to a vacuum chamber to which the cryopump 10 is to be mounted.

The cryopump housing 30 is provided in order to separate the inside ofthe cryopump 10 from the outside thereof. As described above, thecryopump housing 30 is configured to include the trunk portion 32 andthe refrigerator container 38, and the trunk portion 32 and therefrigerator container 38 are gastight and the respective insidesthereof are maintained at a common pressure. This allows the cryopumphousing 30 to function as a vacuum vessel during the pumping operationof the cryopump 10. The exterior surface of the cryopump housing 30 isexposed to the environment outside the cryopump 10 during the operationof the cryopump 10, i.e., even during the operation of the refrigerator.Therefore the exterior surface is maintained at a temperature higherthan that of the radiation shield 40. The temperature of the cryopumphousing 30 is typically maintained at an ambient temperature.Hereinafter, the ambient temperature refers to a temperature of theplace where the cryopump 10 is installed or a temperature close to thetemperature. The ambient temperature may be, for example, at or aroundroom temperature.

Further, a pressure sensor 54 is provided in the refrigerator container38 of the cryopump housing 30. The pressure sensor 54 periodicallymeasures the internal pressure of the refrigerator container 38, i.e.,the pressure in the cryopump housing 30 and outputs a signal indicatingthe measured pressure to the CP controller 20. The pressure sensor 54 isconnected to the CP controller 20 so that the output thereof can becommunicated. Alternatively, the pressure sensor 54 may be provided inthe trunk portion 32 of the cryopump housing 30.

The pressure sensor 54 has a wide measurement range including both abase pressure level attained by the roughing pump 73 and the atmosphericpressure level. It is desirable that at least a pressure range, whichcan occur during a regeneration process, is included in the measurementrange. In the present embodiment, it is preferable to use, for example,a crystal gauge as the pressure sensor 54. The crystal gauge refers to asensor that measures a pressure by using a phenomenon in which theoscillation resistance of a crystal oscillator varies with a pressure.Alternatively, the pressure sensor 54 may be a Pirani gauge. Inaddition, a pressure sensor for measuring a vacuum level and a pressuresensor for measuring an atmospheric pressure level may be provided inthe cryopump 10, separately.

A vent valve 70, a rough valve 72 and a purge valve 74 are connected tothe cryopump housing 30. The opening/closing of each of the vent valve70, the rough valve 72, and the purge valve 74 are controlled by the CPcontroller 20.

The vent valve 70 is provided, for example, at the end of an exhaustline 80. Alternatively, the vent valve 70 may be provided at the middleof the exhaust line 80 and a tank or the like for collecting releasedfluid may be provided at the end of the exhaust line 80. By opening thevent valve 70, the flow of fluid in the exhaust line 80 is permitted,and by closing the vent valve 70, the flow of fluid in the exhaust line80 is blocked. Although the fluid to be exhausted is basically gas, thefluid may be liquid or a mixture of gas-liquid. For example, liquefiedgas that has been condensed by the cryopump 10 may be mixed with thefluid to be exhausted. By allowing the vent valve 70 to open, thepositive pressure occurred in the cryopump housing 30 can be released tothe outside.

The exhaust line 80 includes an exhaust duct 82 for exhausting fluidfrom the internal space of the cryopump 10 to an external environment.The exhaust duct 82 is, for example, connected to the refrigeratorcontainer 38 of the cryopump housing 30. Although the exhaust duct 82 isa duct having a circular cross section orthogonal to the direction ofthe flow, the exhaust duct 82 may have a cross section of any othershapes. The exhaust line 80 may include a filter for removing foreignbodies from the fluid to be exhausted through the exhaust duct 82. Thisfilter may be provided upstream from the vent valve 70 in the exhaustline 80.

The vent valve 70 is configured to also function as a so-called safetyvalve. The vent valve 70 is, for example, a normally closed type controlvalve that is provided in the exhaust duct 82. Further, the strength ofa force required to close the vent valve 70 is defined in advance sothat the vent valve 70 opens mechanically when being subject to apredetermined differential pressure. The predetermined differentialpressure can be set as appropriate by, for example, taking intoconsideration the internal pressure that can be exerted upon thecryopump housing 30, the structural durability of the cryopump housing30, or the like. Since the external environment of the cryopump 10 isnormally at an atmospheric pressure, the predetermined differentialpressure is set to a predetermined value relative to the atmosphericpressure.

The vent valve 70 is typically opened by the CP controller 20 when fluidis released from the cryopump 10, for example, during the regenerationprocess. When fluid should not be released, the vent valve 70 is closedby the CP controller 20. On the other hand, the vent valve 70 ismechanically opened when the defined differential pressure is exertedthereupon. As a result, when the internal pressure of the cryopump risestoo high for some reasons, the vent valve 70 is opened mechanicallywithout requiring control. Thereby, the internal high pressure can bereleased. In this manner, the vent valve 70 functions as a safety valve.Combining the vent valve 70 with a safety valve in this way leads toadvantages of cost reduction and space saving in comparison with a casewhere two valves are separately provided.

The purge valve 74 is connected to a purge gas supply apparatus (notshown). The purge gas is, for example, a nitrogen gas. The CP controller20 controls the purge valve 74, thereby controlling the supply of thepurge gas to the cryopump 10.

The radiation shield 40 is arranged inside the cryopump housing 30. Theradiation shield 40 is formed as a cylindrical shape, one end of whichbeing provided with an opening and the other end being closed, i.e., acup-like shape. The radiation shield 40 may be formed as a one-piececylinder as illustrated in FIG. 2 or a plurality of parts may form acylindrical shape as a whole. The plurality of parts may be arranged soas to have a gap between one another.

The trunk portion 32 of the cryopump housing 30 and the radiation shield40 are both formed as substantially cylindrical shapes and are arrangedconcentrically. The inner diameter of the trunk portion 32 of thecryopump housing 30 is larger than the outer diameter of the radiationshield 40 to some extent, and therefore, the radiation shield 40 isarranged in the cryopump housing 30 without contact, spaced reasonablyapart from the interior surface of the trunk portion 32 of the cryopumphousing 30. That is, the outer surface of the radiation shield 40 facesthe inner surface of the cryopump housing 30. In addition, the shapes ofthe trunk portion 32 of the cryopump housing 30 and the radiation shield40 are not limited to cylindrical but may be tubes having a rectangularor elliptical cross section, or any other cross section. Typically, theshape of the radiation shield 40 is analogous to the shape of theinterior surface of the trunk portion 32 of the cryopump housing 30.

The radiation shield 40 is provided as a radiation shield that protectsthe second cooling stage 14 and a low temperature cryopanel 60, which isthermally connected to the second cooling stage 14, from radiation heatemitted mainly from the cryopump housing 30. The second cooling stage 14is arranged inside the radiation shield 40, substantially on the centralaxis of the radiation shield 40. The radiation shield 40 is fixed to thefirst cooling stage 13 so as to be thermally connected to the stage 13,and is cooled to a temperature comparable to that of the first coolingstage 13.

The low temperature cryopanel 60 includes, for example, a plurality ofpanels 64. Each of the panels 64 has a shape of the side surface of atruncated cone, i.e., an umbrella-like shape. Each panel 64 is attachedto a panel mounting member 66 that is fixed to the second cooling stage14. Typically, an adsorbent (not shown) such as charcoal or the like isprovided on each panel 64. The adsorbent is attached to, for example,the back face of the panel 64. A plurality of the panels 64 are mountedto the panel mounting member 66 with spaces between one another. Aplurality of the panels 64 are arranged in the direction toward insideof the pump from the pump inlet 34.

A baffle 62 is provided in the inlet of the radiation shield 40 in orderto protect both the second cooling stage 14 and the low temperaturecryopanel 60, which is thermally connected to the stage 14, fromradiation heat emitted from a vacuum chamber or the like. The baffle 62is formed as, for example, a louver structure or a chevron structure.The baffle 62 may be formed as circular shapes concentrically arrangedaround the central axis of the radiation shield 40 or may be formed inanother shape such as a lattice or the like. The baffle 62 is mounted atthe opening end of the radiation shield 40 and cooled to a temperaturecomparable to that of the radiation shield 40.

A refrigerator mounting opening 42 is formed on the side surface of theradiation shield 40. The refrigerator mounting opening 42 is formed onthe side surface of the radiation shield 40 at the middle in the centralaxis of the radiation shield 40. The refrigerator mounting opening 42 ofthe radiation shield 40 is provided coaxially with the opening 37 of thecryopump housing 30. The second cylinder 12 and the second cooling stage14 of the refrigerator 50 are inserted through the refrigerator mountingopening 42 in the direction perpendicular to the central axis of theradiation shield 40. The radiation shield 40 is fixed to the firstcooling stage 13 so as to be thermally connected to the stage, at therefrigerator mounting opening 42.

An explanation on the operations of the cryopump 10 with theaforementioned configuration will be given below. When activating thecryopump 10, the inside of the cryopump housing 30 is first roughlyevacuated to approximately 1 Pa to 10 Pa by using a roughing pump 73through the rough valve 72 before starting the operation. The pressureis measured by the pressure sensor 54. Thereafter, the cryopump 10 isoperated. By driving the refrigerator 50 under the control of the CPcontroller 20, the first cooling stage 13 and the second cooling stage14 are cooled, thereby the radiation shield 40, the baffle 62, and thecryopanel 60, which are thermally connected to the stages, are alsocooled.

The cooled baffle 62 cools the gas molecules flowing from the vacuumchamber into the cryopump 10 so that a gas whose vapor pressure issufficiently low at the cooling temperature (e.g., water vapor or thelike) will be condensed and pumped on the surface of the baffle 62. Agas whose vapor pressure is not sufficiently low at the coolingtemperature of the baffle 62 passes through the baffle 62 and entersinside of the radiation shield 40. Of the gas molecules that have beenentered, a gas whose vapor pressure is sufficiently low at the coolingtemperature of the cryopanel 60 will be condensed and pumped on thesurface of the cryopanel 60. A gas whose vapor pressure is notsufficiently low at the cooling temperature (e.g., hydrogen or the like)is adsorbed and pumped by an adsorbent, which is attached to the surfaceof the cryopanel 60 and cooled. In this way, the cryopump 10 can attaina desired vacuum level in the vacuum chamber to which the pump ismounted.

As pumping operation continues, gas is accumulated in the cryopump 10.In order to discharge the accumulated gas to the outside, a regenerationof the cryopump 10 is executed if a predetermined time period has beenpassed after starting the pumping operation or if a predeterminedcondition for starting the regeneration is satisfied. A regenerationprocedure includes a heating process, a discharging process, and acooling process.

The regeneration procedure of the cryopump 10 is controlled, forexample, by the CP controller 20. The CP controller 20 determineswhether or not the predetermined condition for starting the regenerationis satisfied, and in case that the condition is satisfied, starts toregenerate the pump. In this case, the CP controller 20 stops thecooling operation of the refrigerator 50 for cooling the cryopanels andstarts the heating operation, more specifically rapid heating operation,of the refrigerator 50. In case that the condition is not satisfied, theCP controller 20 does not start the regeneration and, for example,continues the vacuum pumping operation.

FIG. 3 shows a flowchart for illustrating a regeneration methodaccording to an exemplary embodiment of the present invention. Theregeneration procedure includes a heating process or step for heatingthe cryopump 10 to a regeneration temperature, which is higher than thetemperature of the cryopanels during the pumping operation. Theexemplary regeneration process shown in FIG. 3 is so-called, fullregeneration. The full regeneration regenerates all cryopanels includingthe low temperature cryopanel 60 and the baffle 62. The cryopanels areheated from a cooling temperature for the vacuum pumping operation to aregeneration temperature, for example near ambient temperature (forexample, about 300 K).

The heating process includes reverse-rotation heating. According to anexemplary embodiment, the reverse-rotation heating differentiatestimings of intake and discharge of the operating gas from those of thecooling operation so as to cause adiabatic compression to the operatinggas by rotating the rotary valve in the refrigerator 50 in the reversedirection from that of the cooling operation. Compression heat obtainedin this manner heats the cryopanels.

As shown in FIG. 3, according to an exemplary embodiment, the heatingstep includes rapid heating (S11) and slow heating (S12). The rapidheating heats the cryopanels at relatively high-speed from a coolingtemperature of the cryopanel during the cooling operation to a thresholdtemperature for switching the heating speed. The slow heating heats thecryopanels at speed lower than that of the rapid heating from thethreshold temperature for switching the heating speed to theregeneration temperature. The threshold temperature for switching theheating speed is, for example a temperature selected from a temperaturerange from 200 K to 250 K. It should be noted that the heating in twophases in the manner described above is not necessarily required. Thecryopanels may be heated at a constant temperature rising speed, or maybe heated by a heating process having more than two phases each of whicha respective temperature rising speed is assigned to.

During the heating process, the CP controller 20 controls the valvedrive motor 16 so as to rotate at higher speed during the rapid heatingthan the speed thereof during the slow heating. During the rapidheating, the CP controller 20 determines whether or not a measured valueof the cryopanel temperature reaches the threshold temperature forswitching the heating speed. The CP controller 20 continues rapidheating until the measured value reaches the threshold temperature, andswitches from the rapid heating to the slow heating in case that themeasured value reaches the threshold temperature. During the slowheating, the CP controller 20 determines whether or not a measured valueof the cryopanel temperature reaches the regeneration temperature. TheCP controller 20 continues the slow heating until the measured valuereaches the regeneration temperature, and completes the heating processand starts the subsequent process, i.e., discharging step in case thatthe measured value reaches the regeneration temperature.

The discharging step discharges gas, which is re-evaporated from thesurface of the cryopanels, to the outside of the cryopump 10 (S14). There-evaporated gas is discharged outside, for example, via the exhaustline 80, or by using the roughing pump 73. The re-evaporated gas isexhausted from the cryopump 10 with purge gas that is infused asnecessary. During the discharging step, the heating operation of therefrigerator 50 may be continued, or the operation of the refrigerator50 may be stopped.

According to an exemplary embodiment, the discharging step may include aso-called rough-and-purge step. This is a step of discharging a gas byrepeating rough pumping through the rough line 90 and infusion of apurge gas. An initial pressure and a final pressure are set for aroughing step of the cryopump 10 through the rough line 90. The initialpressure is, for example, atmospheric pressure. The final pressure ishigher than the base pressure level, and is selected from, for example,a range of 50 Pa to 500 Pa and, more preferably, a range of 100 Pa to300 Pa. This pressure region is referred to as a “semi-base pressurelevel” below. According to another embodiment, the final pressure may bethe base pressure level. The internal pressure of the cryopump duringthe rough-and-purge step goes back and forth within the pressure regiondefined by these initial and final pressures in an oscillating manner.

The present regeneration method includes a step of determining whetheror not the gas has been discharged based on a pressure, which may bereferred as a buildup determination step (S16). The buildupdetermination is executed between the discharging step and the coolingstep. The buildup determination may be regarded as part of thedischarging step. For the buildup determination, the valves includingthe rough valve 72 are closed, and the cryopump housing 30 is maintainedgastight. If the gas is completely discharged (in addition, if there isno leakage, strictly speaking), the pressure of the cryopump housing 30will be maintained.

Hence, the CP controller 20 determines whether or not the gas has beendischarged based on a rate of pressure rise, that is, whether or not arise in pressure occurs within a determination time. A pressurethreshold for detecting the pressure rise is set in advance. In order toperform the buildup determination, the CP controller 20 uses, forexample, a pressure measured value inside the cryopump 10 that ismeasured by the pressure sensor 54.

The CP controller 20 controls to transition to the next step, e.g., thecooling step, if the buildup determination indicates “pass”, that is, ifthe CP controller 20 determines that no pressure rise occurs. The CPcontroller 20 controls to return to the discharging step if the buildupdetermination indicates “failure”, that is, if the CP controller 20determines that the pressure rise has occurred. When returning to thedischarging step, the CP controller 20 may perform the buildupdetermination step again after re-rough only or rough-and-purge.

In an embodiment, the CP controller 20 may execute the buildupdetermination step configured to include multiple sub-steps. Forexample, the CP controller 20 may execute a first buildup determinationsub-step performed in a low vacuum region, and a second buildupdetermination sub-step performed in a vacuum region higher than the lowvacuum region. The first buildup determination may be directed todetermining whether or not the final pressure in the rough-and-purgestep is maintained. In other words, the first buildup determination maybe directed to determining whether or not the semi-base pressure levelis maintained.

For the cryopump 10 which has passed the first buildup determination,the pressure is reduced to a lower pressure, e.g., the base pressurelevel, through the rough line 90. The second buildup determination maybe directed to determining whether or not the base pressure level ismaintained. The cryopump 10 which has passed the second buildupdetermination is controlled to transition to the cooling step. Thecryopump 10 which has failed to pass the buildup determination in anyone of the sub-steps is controlled to continue the discharging stepincluding the buildup determination.

The cooling step re-cools the cryopanels in order to restart the vacuumpumping operation (S16). The cooling operation of the refrigerator 50 isstarted. Rough pumping may also be performed in at least part of thecooling step. The rough pumping may be continued, for example, from thestart of the cooling step until the pressure and/or the temperaturereaches a rough finish pressure and/or a rough finish temperature,respectively. The CP controller 20 determines whether or not a measuredvalue of the cryopanel temperature reaches a cryopanel coolingtemperature for the vacuum pumping operation. The CP controller 20continues the cooling step until the measured value reaches thecryopanel cooling temperature, and completes the cooling step in casethat the measured value reaches the cooling temperature. In this manner,the regeneration procedure is completed. The vacuum pumping operation ofthe cryopump 10 is restarted.

As described above, the CP controller 20 allows the plurality ofcryopumps 10 to be regenerated at the same time or in parallel. In fact,regeneration should be executed during a down time of the vacuumprocessing apparatus or during a period in which a vacuum process is notperformed in the apparatus, and therefore the plurality of cryopumps 10are usually regenerated in parallel.

To reduce the regeneration time of the plurality of cryopumps 10 intotal, it is preferable to regenerate them in parallel instead ofsequentially regenerating the cryopumps 10 one by one. If theregeneration could be completely synchronized in each of the pluralityof cryopumps 10 to start and finish it at the same time, the roughvalves 72 of the cryopumps 10 in regeneration would be opened/closed atthe same time. However, the cryopumps 10 may contain different amountsof accumulated gas and may have individual differences in performance,and therefore completely synchronized regeneration may be impractical.

Hence, parallel regeneration is employed for the plurality of cryopumps10. Such parallel regeneration may include a reconnecting operation ofthe roughing pump 73 from one cryopump 10 to another cryopump 10.

Immediately after the rough valve 72 of a cryopump 10 is closed and therough pumping is completed, the pressure in the rough piping 92 is atthe level of the final pressure of the rough pumping. A period of time(for example, about several seconds) is required to further depressurizethe rough piping 92 to a lower pressure level, e.g., the ultimate vacuumpressure of the roughing pump 73. The internal pressures may bedifferent when different steps in regeneration are executed in theindividual cryopumps 10. Hence, a cryopump 10 to be rough pumped nextmay have a lower internal pressure than the pressure in the rough piping92. In this case, the cryopump 10 may be transiently or temporarilypressurized due to the higher pressure in the rough piping 92. Further,particles may enter into the cryopump 10 together with the reverse flowoccurring from the rough piping 92 into the cryopump 10.

Hence, according to an exemplary embodiment of the present invention,the cryopump system 100 is configured such that, before rough pumping ofa certain cryopump 10 has been finished, another cryopump 10 in whichrough pumping is subsequently performed is on standby. Further, even ifthe rough pumping of the certain cryopump 10 has been finished, thecryopump system 100 temporarily continues the standby state of thecryopump 10, and slightly delays start of the subsequent rough pumpingof the cryopump 10. During the rough pumping standby time of thecryopump 10, a process which does not require the roughing pump 73 suchas the purge gas infusion or the buildup determination may be performed.

To delay the start of the subsequent rough pumping for the cryopump 10,the CP controller 20 controls the rough valves 72 such that, when one ofthe rough valves 72 is open, any other rough valves 72 are forbidden toopen. Further, the CP controller 20 temporarily continues the forbiddingof opening of the other rough valves 72 even after the open rough valve72 is closed. That is, the CP controller 20 sets a delay time or standbytime from the closure of one of the rough valves 72 to the opening of adifferent one of the rough valves 72.

The cryopump system 100 comprises the plurality of cryopumps 10including a first cryopump and a second cryopump. For ease ofdescription, the first cryopump is referred to as “cryopump A”, and thesecond cryopump is referred to as “cryopump B”. Further, the rough valve72 accompanying or associated with the cryopump A is referred to as“rough valve A”, and the rough valve 72 accompanying or associated withthe cryopump B is referred to as “rough valve B”.

The method of regenerating the plurality of cryopumps 10 for thecryopump system 100 includes performing the steps of heating,discharging, and cooling for the cryopump A and the cryopump B,respectively.

The discharging step of the cryopump A includes a depressurizing step ofthe cryopump A through the rough line 90. The depressurizing step startswhen the rough valve A is opened to connect the cryopump A to theroughing pump 73, and terminates when the rough valve A is closed toisolate the cryopump A from the rough line 90. The subsequent step ofthe depressurizing step for the cryopump A may be the infusion of apurge gas to the cryopump A, the buildup determination of the cryopumpA, or the cooling of the cryopump A.

Similarly, the discharging step of the cryopump B includes adepressurizing step of the cryopump B through the rough line 90. Thedepressurizing step starts when the rough valve B is opened to connectthe cryopump B to the roughing pump 73, and terminates when the roughvalve B is closed to isolate the cryopump B from the rough line 90. Thesubsequent step of the depressurizing step for the cryopump B may be theinfusion of a purge gas to the cryopump B, the buildup determination ofthe cryopump B, or the cooling of the cryopump B.

According to an exemplary embodiment of the present invention, duringthe parallel regeneration of the cryopump A and the cryopump B, thedepressurizing step of the cryopump B may be executed subsequently tothe depressurizing step of the cryopump A. As described above, the CPcontroller 20 is configured to set the delay time between an end ofdepressurizing of the cryopump A and start of depressurizing of thecryopump B. Therefore, the depressurizing step of the cryopump B isexecuted after the delay time passes from the depressurizing step of thecryopump A. More specifically, the delay time is set between closing ofthe open rough valve A and opening of the closed rough valve B, and therough valve B is opened after the rough valve A is closed and the delaytime passes.

In an embodiment, such a delay time is uniformly applied upon closing ofeach rough valve 72 for simplicity of control. The delay time may be afixed preset value. The delay time is set to a time in which thepressure of the rough piping 92 is reduced to the base pressure level.The time may be based on characteristics of the rough line 90, forexample, transient characteristics in pressure of the rough piping 92caused by the roughing pump 73. The delay time is within, for example,ten seconds or less, and is preferably selected from a range of onesecond to three seconds.

FIG. 4 shows a flowchart for describing a control process according toan exemplary embodiment of the present invention. The CP controller 20may determine whether or not a delay permission condition is satisfied(S20). The delay permission condition may include a plurality ofconditions, and the CP controller 20 may determine that the delaypermission condition is satisfied if any one of the conditions issatisfied.

When the delay permission condition is satisfied (Y in S20), the CPcontroller 20 enables the delay time (S22). When the delay permissioncondition is not satisfied (N in S20), the CP controller 20 disables thedelay time (S24). That is, the delay is applied when the delaypermission condition is satisfied and otherwise the delay is notapplied.

The CP controller 20 cyclically repeats executing this determiningprocess for the delay permission during, for example, regeneration ofthe cryopump 10. After the regeneration of the cryopump 10 is started,the delay time is disabled before the delay permission condition hasbeen satisfied. In this situation, the delay is not applied to thereconnecting operation of the roughing pump 73 between the plurality ofcryopumps. The delay is applied while the delay permission condition issatisfied. When the delay permission condition is not satisfied again,the delay time is also disabled again, and then the delay is notapplied.

During regeneration, rough pumping is typically executed more than onetime in a cryopump. For example, when the status of the cryopump A is inthe first half of the regeneration process and the status of thecryopump B is in the last half of the regeneration process, the cryopumpB has been rough pumped at least once, prior to roughing of the cryopumpA. The internal pressure of the cryopump becomes lower at the finalstage of regenerating process compared to the initial stage ofregeneration. When the cryopump A is first rough pumped and subsequentlythe cryopump B is rough pumped, the cryopump B may be of a lowerpressure than that of the cryopump A

For example, when the cryopump A is for example at the rough-and-purgestep, which means before the buildup determination, and the cryopump Bis in the middle or after the buildup determination, the initialpressure of rough pumping of the cryopump B can be lower than the finalpressure of rough pumping of the cryopump A which is equal to thepressure at that time in the rough piping.

Consequently, the delay permission condition may be determined based onthe status of at least one of the cryopumps 10, for example, the step ofthe regeneration process currently executed in the at least one of thecryopumps 10. In this case, the delay permission condition may include acondition that the buildup determination is being executed or has beenexecuted at least once in any one of the cryopumps.

The delay permission condition may include a condition that the internalpressure of at least one of the plurality of cryopumps 10 is equal to orless than a predetermined pressure. For example, the delay permissioncondition may include a condition that the internal pressure of at leastone of the plurality of cryopumps 10 is at the semi-base pressure levelor the base pressure level. For example, the delay permission conditionmay include a condition that the pressure of at least one of theplurality of cryopumps 10 is 300 Pa or less, 200 Pa or less, 100 Pa orless, or 50 Pa or less. For example, the measured value of the pressuresensor 54 may be used for the internal pressure of the cryopump 10.Alternatively, a preset parameter for defining a rough pumping process,such as a predefined initial pressure of the rough pumping or apredefined final pressure of the rough pumping, may be used.

Further, the delay permission condition may be determined based on anoperating state of one of the cryopumps 10 with the corresponding roughvalve 72 being closed and an operating state of one of the cryopumps 10with the corresponding rough valve 72 to be opened next. In this case,the delay permission condition may include a condition that the buildupdetermination has not been executed in a cryopumps 10 that is about tofinish the rough pumping, and the buildup determination is beingexecuted or has been executed at least once in another cryopump to berough pumped next.

The delay permission condition may include a condition that the initialpressure of the rough pumping of the cryopump B is lower than the finalpressure of rough pumping of the cryopump A. That is, the delaypermission condition may include a condition that the internal pressureof the cryopump B that has the rough valve B to be opened next is lowerthan the internal pressure of the cryopump A that has the rough valve Ato be closed. The condition may additionally include that the internalpressure of the cryopump B connected to the roughing pump 73 is thesemi-base pressure level or the base pressure level. Meanwhile, theinternal pressure of the cryopump 10 may be a measured value or a presetvalue. The pressure in the rough piping 92 may be used instead of theinternal pressure of the cryopump 10 to be isolated from the roughingpump 73. For this purpose, the rough line 90 has a pressure sensor or apressure switch for measuring the pressure in the rough piping 92.

According to an exemplary embodiment of the present invention, start ofa new rough pumping in a cryopump 10 is delayed to some extent from theend of the last rough pumping in another cryopump 10. The roughing pump73 can sufficiently depressurize the rough piping 92 during the delaytime. Consequently, a transient pressure rise due to the rough piping 92can be prevented at the start of the new rough pumping in the cryopump10. Also, particles are prevented from entering the cryopump 10 from therough piping 92.

In a high vacuum region for the roughing pump 73 such as the semi-basepressure level or in particular the base pressure level, a longer timeis required for the same amount of depressurization compared to a lowvacuum region (for example, the atmospheric pressure level).Accordingly, the transient pressure rise due to the rough piping 92 inthe high vacuum region would require a time-consuming rough forrecovery. The delay time is, however, about a few seconds for example,which is expected to be shorter than a time required for the recovery ofpressure. Consequently, the total time required for regeneration can beshortened with adding the delay time.

The present invention has been described above based on the embodiments.It should be appreciated by those skilled in the art that the inventionis not limited to the above embodiments but various design changes andvariations can be made, and such variations are also encompassed by thepresent invention.

The duration of the delay time may not be necessarily fixed. Forexample, the delay time may be changed according to the pressure levelof the cryopump 10 for which opening of the rough valve 72 is delayed.The delay time may be changed according to the pressure differencebetween a cryopump that has a rough valve to be opened and a cryopumpthat has a rough valve to be closed. Further, when the pressure of therough piping 92 is sufficiently reduced in the middle of the delay time,the next rough valve 72 may be quickly opened by breaking off the delaytime.

It should be understood that the invention is not limited to theabove-described embodiment, but may be modified into various forms onthe basis of the spirit of the invention. Additionally, themodifications are included in the scope of the invention.

Priority is claimed to Japanese Patent Application No. 2011-108426,filed May 13, 2011, the entire content of which is incorporated hereinby reference.

What is claimed is:
 1. A cryopump system comprising: a plurality ofcryopumps connected to a common roughing pump in a rough line andprovided with a plurality of rough valves in the rough line,respectively; and a controller configured to control each of the roughvalves for regenerating a corresponding one of the plurality ofcryopumps, wherein a delay time is set between closing of an open one ofthe plurality of rough valves and opening of a closed one of theplurality of rough valves, wherein the controller applies the delay timeuniformly upon closing of each of the rough valves.
 2. The cryopumpsystem according to claim 1, wherein the delay time is a fixed presetvalue.
 3. The cryopump system according to claim 1, wherein the delaytime is selected from a range of one second to ten seconds.
 4. Thecryopump system according to claim 1, wherein the delay time is selectedfrom a range of one second to three seconds.
 5. The cryopump systemaccording to claim 1, wherein the delay time is set such that a pressureof a rough piping that connects the closed one of the plurality of roughvalves to the roughing pump is depressurized within the delay time to apressure lower than an internal pressure of a corresponding cryopumpprovided with the closed one of the plurality of rough valves.
 6. Thecryopump system according to claim 5, wherein the delay time is set to atime within which the pressure of the rough piping is reduced to a basepressure level that is an initial pressure for the cryopumps inoperation.